JPS62114176U - - Google Patents
Info
- Publication number
- JPS62114176U JPS62114176U JP122586U JP122586U JPS62114176U JP S62114176 U JPS62114176 U JP S62114176U JP 122586 U JP122586 U JP 122586U JP 122586 U JP122586 U JP 122586U JP S62114176 U JPS62114176 U JP S62114176U
- Authority
- JP
- Japan
- Prior art keywords
- cryopump
- filter
- dust
- gas
- regenerating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000428 dust Substances 0.000 claims 2
- 230000001172 regenerating effect Effects 0.000 claims 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP122586U JPH0210315Y2 (en]) | 1986-01-10 | 1986-01-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP122586U JPH0210315Y2 (en]) | 1986-01-10 | 1986-01-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62114176U true JPS62114176U (en]) | 1987-07-20 |
| JPH0210315Y2 JPH0210315Y2 (en]) | 1990-03-14 |
Family
ID=30778935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP122586U Expired JPH0210315Y2 (en]) | 1986-01-10 | 1986-01-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0210315Y2 (en]) |
-
1986
- 1986-01-10 JP JP122586U patent/JPH0210315Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0210315Y2 (en]) | 1990-03-14 |
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